D60 controller manual

I would recommend contacting Kawasaki directly for those as the controllers are classed under their 'Semiconductor' range and therefore not as common.

Kawasaki only shares this info with direct customers. If you buy the product directly from Kawasaki they will share it. If you have a piece of equipment that uses a semiconductor robot you have to contact the equipment manufacturer that integrated the kawasaki robot into their tool set.

So if anyone has any info related to the D60/D61 series controllers I would greatly appreciate it.

Ref: Kawasaki D60 controller

This ctrl for wafer robot